Fabrication of periodic micro-structures by holographic lithography
نویسندگان
چکیده
منابع مشابه
Additive Fabrication of 3d Structures by Holographic Lithography
As additive manufacturing (AM) technologies advance and mature, the geometric constraints imposed by fabricating 2D planar layers become increasingly important to overcome. In the realm of light-driven AM fabrication, holography provides a promising avenue toward true 3D structures. Being capable of recording and reconstructing 3D information, holographic shaping of the light field can enable d...
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Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical appl...
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We present an optical interference model to create chiral microstructures (spirals) and its realization in photoresist using holographic lithography. The model is based on the interference of six equally-spaced circumpolar linear polarized side beams and a circular polarized central beam. The pitch and separation of the spirals can be varied by changing the angle between the side beams and the ...
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Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti : sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemic...
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We have demonstrated simultaneous fabrication of designed defects within a periodic structure. For rapid fabrication of periodic structures incorporating nanoscale line-defects at large area, topographically assisted holographic lithography (TAHL) technique, combining the strength of hologram lithography and phase-shift interference, was proposed. Hot-embossing method generated the photoresist ...
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ژورنال
عنوان ژورنال: Lithuanian Journal of Physics
سال: 2013
ISSN: 1648-8504
DOI: 10.3952/lithjphys.53406